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박막 성장방법

박막 성장방법 상세정보
대표분류 도금 구분 소액무상특허
기술테마 도금
연구기관 한국과학기술연구원 연구자 백영준
기술내용 이전대상 특허번호: 8247031(미국)
이전유형: 양도
이전비용 : 1천만원
비고: 부가세별도

Disclosed is a method for growing a thin film, which includes modifying a surface grain size and surface roughness on a thin film to improve the mobility of a carrier and a light scattering effect. The method for growing a thin film includes: forming nuclei of grains having various grain orientations on a substrate; causing first grains having a first specific grain orientation to grow predominantly among the grains having various grain orientations, thereby forming a first preferred texture comprised of the predominantly grown first grains; and then causing second grains having a second grain orientation to grow predominantly, thereby forming a second preferred texture comprised of the predominantly grown second grains, wherein the surface grain size of each of the second grains forming the second texture is larger than that of each of the first grains forming the first texture.
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